Miniature mould processing technique

1 μ M is the following; Mould production precision arrives from 1 μ M 0.

1 μ M. Predict to begin from 2010, field of Chinese MEMS is added fast will accelerate, 2011 add fast hopeful to amount to 29.

2% . Miniature mould machines difficulty miniature mould and do not show bulk is tiny surely, traditional volume is large but have small structure special the mould of a note of the ancient Chinese five-tone scale also calls miniature the pattern. The production difficulty of miniature mould is being machined at sunken structure of small small-sized antrum or tiny protruding, and the production of mould other structural member and common mould agree basically. The figuration of small small-sized antrum can be in a minor volume the treatment on metallic piece, like that after metallic piece sets a built-in pattern plate as hand-in-hand travel whole is assembled, this is mixed at the imperceptible treatment of small small-sized antrum not only set piece change, and can improve mould whole life. Traditional mechanical treatment method cannot machine dimension the miniature mould with too small size of too little small perhaps texture, dimension precision and exterior surface roughness the design requirement of mould of short of miniature. Although the photoetching technology that development rises now can realize the demand with dimension small high precision, but photoetching technology makes charge because of its cycle of costly, treatment is long, technological process is complex wait for blemish and restricted its to apply extensively. Miniature mould processing technique develops course of processing technique of mould of fast and phyletic various miniature in last few years quickly, sort is more various. By its treatment principle differs can divide it is 3 kinds big: Finishing makes a technology, be like technology of technology of LIGA technology, UV-LIGA technology, electron beam photoetching, laser beam machining; Corrode a technology, if engrave corrode technology; Personal computer fetterses processing technique, machine a law like the tradition such as imperceptible turning, imperceptible milling, imperceptible grinding, imperceptible electric spark. The optical technology that make basically applies machine at the part that has micron level small structure, treatment precision amounts to 10nm the following; Application of small machining technology is machined at the part that has millimeter level small structure, treatment precision 100nm is the following. 1.

Technology of LIGA technology LIGA is to develop the new-style finishing that rise to make a technology in recent years, name source Wu Dewen, mean the perfect union that for deepness X ray quarter corrode, electroform shapes to wait for a technology with plastic mould. Its are main technological process is as follows. Does deepness X ray engrave corrode: ? Ray of Zuo of  of any of several hot spice plants of  fierce  engraves corrode to give the photoetching glue figure of older aspect ratio on the photoetching mucus with hundreds of thick micron, aspect ratio is achieved commonly 100. Electroform shapes reach patternmaking: From electrode the metal deposit is in the space of the photoetching glue graph of motherboard, till till metallic cram is whole the graph of photoetching glue is interstitial. Actually, this one process is translate into of photoetching glue graph the metallic graph of contrary structure. This metal structure can serve as end item, also can regard batch as duplicate mould. Note a model to duplicate: Contain the attach of metal pattern carapace of take out substrate and photoetching glue the plate of infuse aperture, from infuse the infuse in Kongxiang antrum is plastic, carapace of model of cooling after take out. Next plastic structure keeps on plate, this is plastic the structure serves as small products. With traditional other photograph of imperceptible processing technique is compared, LIGA technology has a lot of advantages: Precision is tall, can achieve inferior micron class; Can get tall deep wide than the structure, amount to hundreds of above; The linearity of edge height direction and verticality are first-rate; Applicable Wu Duo is planted material, be like a metal, pottery and porcelain and polymer. Its defect is: Need to use ray of costly synchronous radiate X, cost is high; Gotten form is columnar, machine the small parts of an apparatus of curved surface and cant hard; Cannot build the housing with a little big stomach. 2.

The ray of synchronous radiate X with UV-LIGA high technology restricted the application of LIGA technology. And use as similar as its craft principle, exploration low cost is profound wide emerge as the times require of compared accurate LIGA technology, derive UV-LIGA technology, Laser-LIGA technology and Dem technology to wait. The UV-LIGA technology of the photoetching glue that comfortable Wu Zhonghou spends already got applied extensively, its technology essence is the ray of synchronous radiate X that the deepness exposure that uses deep ultraviolet light will come to replace LIGA technique deepness exposure. Compare X ray, the exposure deepness of deep ultraviolet ray wants a lot of lower, when exposure thicker PMMA photoetching mucus (use for many times at the need when 4 μ M) greatly exposure, for many times the method of develop will come true. IBM company research and development gives SU-8 of a kind of new-style glue of photoetching of negative deep ultraviolet ray now, can reduce exposure number, get better exposure result. Issue the main technological process that is this technology. Exposure of deepness ultraviolet ray: Use ultraviolet ray to engrave corrode to give photoetching glue figure on SU-8 photoetching glue. Electroform shapes reach patternmaking: From electrode the metal deposit is in the space of the photoetching glue graph of motherboard, till till metallic cram is whole the graph of photoetching glue is interstitial, this metal structure regards batch as duplicate mould. Note a model to duplicate: Duplicate on metallic structure with method of the figuration that note model the products of plastic small construction with an as small as the metal contrary structure. Nextpage occupies a watch 1, UV-LIGA technology and LIGA technology photograph are compared, have finished cost the dominant position with low, short cycle, but machining deepness, deep wide compare and the parameter respect presence such as sidewall verticality is scant. To Wu Xing antrum sidewall verticality is reached deep wide comparing a requirement is not very tall when, it can replace LIGA technique completely. Current, UV-LIGA technology is in model antrum deepness is small the application that the success gains in be being made at the mould of 100 μ M, replace stage by stage before traditional machining method. 3.

Technology of photoetching of electron beam of technology of electron beam photoetching is a kind of processing technique that uses electron beam action to form small accept structure on photoetching glue. It needs an exposure engine that produces electron beam, at present exposure opportunity basically has two kinds of kinds: Write type and umbriferous type continuously. Opportunity of the straight exposure that write type hits the electron beam that gather on the underlay that the surface besmears bright engraves glue directly, do not need the thin coating of expensive attack by surprise in optical photoetching craft. And the miniaturization as opportunity of exposure of the straight electron beam that write type, the application of technology of the straight photoetching that write type in scientific research will be wider and wider. But its limitation is in at, electron beam is to scan resemble model, productivity is extremely low, far the 40-100 that can not achieve optical photoetching piece / the productivity of the hour, modular batch produces very difficult applicable Wu Dagui. because such, electron beam photoetching is used commonly at the high accuracy that make film of attack by surprise. 4.

Quarter corrode technology is so-called quarter corrode technology is chemically or physical method has a choice from base piece the course that exterior eliminate does not need data. Its are from the cent on mechanism wet with dry method two kinds. Wet quarter corrode is immerse silicon chip in the solution that can have reaction with film of the corrode that be engraved, chemically method eliminate does not need partial film. Doing a law to engrave corrode is will be machined base piece buy at plasma in, taking mordant, below the shell that possesses certain energy particle, reaction makes gaseous material, purify is engraved corrode is filmy, this kind of method has anisotropy commonly. The sort that does a law to engrave corrode is more, its action mechanism can divide the basis to engrave corrode for physics, chemistry engraves corrode, physics - chemistry engraves corrode 3 kinds. In doing a law to engrave corrode, physics is splashed shoot action bigger, side direction engraves corrode smaller, anisotropy is better, but its are differred optionally, quarter corrode rate is low, right base piece loss is big. Quarter corrode can divide dry method to engrave corrode for plasma, reaction ion engraves corrode, splash shoot quarter corrode, ionic bundle of quarter corrode, reaction is ionic bundle of quarter corrode. 5.

Imperceptible turning is imperceptible turning is treatment circumgyrate kind the effective method of the spare parts. The servo feed system that when machining miniature spare parts, asks to reasonable miniature changes lathe, condition to monitor main shaft of precision of tall circumgyrate of system, high speed, high resolution, and where a thing can be put to best use is ample small, hardness is enough tall lathe tool. Compare common turning, the lathe of imperceptible turning and cutting tool are smaller, of course work is less also. Japan connects courtyard of technology yield a province to developed a lathe of miniature of world head stage 1996. Wide 25mm of this lathe long 32mm is tall 30.

5mm, heavy only 100g; Rated power of main shaft electric machinery 1.

5W, rotate speed 10000rpm. With its cut brass, the Rz1 of exterior surface roughness of feed direction.

5 μ M, treatment workpiece circularity 2.

5 μ M, what treatment goes out is the smallest outside round diameter 60 μ M. System of a when Japanese Jin Ze university develops imperceptible turning, include imperceptible lathe, control is unit, optical and microscopical system and monitor. The machine grows 200mm, main shaft power 0.

5W, rotate speed 3000-15000rpm is successive and adjustable; Radial and jumpy less than of 1 μ M; Diameter of the workpiece that hold clip 0.

3mm; The feed resolution 4nm of XYZ axis; Cutting force is monitored through a mechanical sensor that has three way, in order to raise the feed precision of basic level. Use the diamond bougie needle on nuclear power microscope to make lathe tool, in the diameter 0.

The treatment on the brass silk semifinished product of 3mm gives a diameter of 10 μ M outside columnar face, still machined grow 120 μ M, pitch 12.

The filar lever of 5 μ M. Graph 2 miniature lathe 6.

Imperceptible milling is imperceptible milling technology basically is to use a diameter a few micron establish milling cutter to the miniature of one millimeter, in groovy dimension super- imperceptible treatment has on accurate machine tool. By basically use the blame with very tall precision of Wu Jia labour at these machine tools part of tiny geometry dimension, need high design and workmanship to achieve expectation precision normally, and small to Wu Wei part, lack necessary flexible, and cost is high, efficiency is low. Research and development makes the milling that a kind of miniature changes machine equipment extremely urgent, it has economic space, save the sources of energy, yi Wuchong group, cost is low advantage. The research that at present home machines to imperceptible milling basically is machining exterior quality centrally, milling force, of milling cutter wear away and life, the respect such as milling condition and the process capability to small part. Institute of project of nicety of Harbin Institute of Technology developed country milling machine of first small small-sized horizontal, dimension is 165mm of × of 300mm × 150mm, main shaft is highest rotate speed is 14000r/min, drive system resolution is 0.

1 μ M. Came true to be × of 700 μ M in dimension of the milling on duralumin LY12 20 μ of 40 μ M and × of 500 μ M the thin wall structure of M; The organic glass that is 12mm × 8mm and 8mm × 5mm in two dimension undertook the CNC Machining of person face curved surface on material. Recently, harbin Institute of Technology develops a 3 axes successfully again milling machine of small small-sized vertical. Its dimension is 290mm of × of 300mm × 300mm, main shaft is highest rotate speed 16000r/min, the biggest radial is jumpy 1 μ M, drive system repeats fixed position precision 0.

25 μ M, speed limits 1 μ M~250mm/s, full closed-loop control, resolution 0.

1 μ M. It is used 0.

The miniature of 2mm establishs milling cutter, can be in the small Bao Gang with 70 μ thick M piece on machine chamfer of a miniature. Nextpage pursues milling machine of 3 miniature vertical 7.

Imperceptible grinding machines imperceptible grinding is emery wheel and arenaceous belt of the surface grind bead to regard as approximately edge, whole emery wheel can regard cutting tool. When grinding machines small parts of an apparatus, need to note the following problem: Grind bead to be able to become blunt below circumstance of high temperature of high speed high pressure; Grind bead to be able to fall off below high speed circumstance. Grinding treatment is used technically at hard and fragile material, grind in grinding treatment annulus cutting blade holds sharp position is the key in treatment, use ELID (online electroanalysis nap emery wheel) the technology undertakes grinding in grinding treatment process annulus the method that imperceptible nap is effective. Choose hardness additionally tall, high temperature resistant, meeting slow down wears the stuff wearing bead of wear-resisting bead becomes blunt to mix fall off circumstance. 8.

Imperceptible electric spark machines imperceptible electric spark to machine principle and treatment of common electric spark the principle is basic and same, it is base at the report when the pulse sex scintilla between electrode and workpiece discharges is passed to corrode a phenomenon to come in the working fluid of insulation corrode removes redundant material, in order to reach pair of spare parts size, the treatment that appearance and exterior quality book asks. Treatment of imperceptible electric spark has low stress, without burr, can machine the advantage such as tall hardness material, in machining a domain imperceptibly by use extensively, already made this field an important development way. The key that realizes treatment of imperceptible electric spark is in the making at tiny electrode, power source of tiny energy discharge, the minim servo feed of tool electrode, treatment status is monitored, systematic control and treatment technique. The person such as Masuzawa T of Japanese Tokyo university turns over the foundation that beat machines to go up in electric spark, use linear the technique of grinding of line electrode electric spark that electrode replaces the module that turn over beat to develop a success solved imperceptible electrode successfully make, make treatment of imperceptible electric spark enters practical phase, become the heat that machines a domain imperceptibly. Compare above integratedly 8 kinds of imperceptible processing technique, odd from treatment precision, the respect such as exterior surface roughness will consider, LIGA technology is best, take second place of technology of the others photoetching, small machining technology is the wrongest. All sorts of treatment methods machine the limitation of the principle by Wuji, its suit the small structure appearance of treatment. For instance, LIGA technology can machine columnar small structure only; Imperceptible turning suits to machine circumgyrate kind spare parts; Imperceptible grinding suits to machine groove kind small structure. To the treatment precision at small structure, not be precision had jumped over higher, consider the factor such as the price, cycle even. As a whole, can contented requirement and the treatment method that low periodic brief life grows the price just is best method. A few kinds of imperceptible processing technique see a table quite 2. Technology of applied citing LIGA is in model core sets a treatment in had crucial effect, a few small measure that implement hard, high accuracy, profound wide compare model core is set piece use this technology successfully already. A.

B of mold insert of nickel model core.

In the mold insert of core of model of small columnar array that technology of 4 LIGA of micrograph of small columnar array makes 200 μ M south institute of technology of mould of institute of university Electromechanical project Dr. Shen Longjiang is machining mould of small lens array core to set piece when. Design its according to appearance of small lens array above all model core is set piece, craft parameter should be changed to fall the shrinkage of goods to be close to Wu Ling through actor in shaping by the inject of array of Wu Zaiwei lens, ability assures goods precision and quality, the economy that the uncertainty with the contractive goods in considering an experiment even at the same time and modular core make. The design of the modular core mold insert that tells here takes no account of the systole of goods, press 1:1scale design antrum. When the design, even integrated consideration core sets the slip structure design of an installation and the processing technique that will use. What foreground looks into the constant growth that makes a demand to miniature as domain of system of personal computer cable and quality requirement is ceaseless rise, miniature mould processing technique also is developing ceaselessly and perfect, make in order to satisfy miniature requirement. Traditional imperceptible treatment method machines three-dimensional and tiny mould antrum, although craft is simple practical, and do not need too large investment, but size of its treatment antrum is too large, precision is too low; Although the non-traditional machining craft such as electrochemistry is relatively complex, but in difficult cutting material, complex model in treatment of the mould of face and low stiffness material antrum, have the advantage that cannot replace; It is smooth processing technique of the representing with LIGA technology and UV-LIGA technology, technology is most sophisticated, but its treatment precision is highest, accessible deep wide than the biggest, mould antrum size is the smallest, it is the means of miniature mould treatment that provides development prospect most. To get used to small products spare parts more requirements, further research works to machine dimension besides what machine a respect to reduce a hardware ceaselessly in small mechanical cutting, outside raising treatment precision, still answer to develop new non-traditional machining technology and smooth processing technique ceaselessly. CNC Milling CNC Machining